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Silane (SiH4) |
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 A colorless
and extremely reactive compressed gas. Toxic. Reacts spontaneously
in air.
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Molecular Weight:
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32.11
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Safety Data
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|
|
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Specific Volume:
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12.1 cf/lb@NTP
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ACGIH -TLV: 5 ppm |
Critical Temperature:
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25.8 °F
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Boiling Point:
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-168.7°F(-111.5°C)@1atm
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Critical Pressure:
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702.5 psia
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CAS No.:
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7803-62-5
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Hazards:
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Inhalation and skin contact
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DOT Label:
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Red, Flammable Gas |
UN Number:
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UN 2203
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DOT Class:
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2.1 |
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Cylinder:
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Steel Alloy
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Cylinder
Size
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DOT
Specification
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Cylinder
Dimension
(in.)
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Average
Tare Weight
(lbs)
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Average
Internal Volume
(ft3)(L)
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Contents
(lbs)
|
|
200
|
3AA2265
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9x51
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119
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1.55 (43.9)
|
22
|
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GRADE
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ELECTRONIC
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VLSI
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METAL
|
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Critical Assay
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99.999%
|
99.9999%
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Al
|
5 ppb
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Nitrogen
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< 0.2 ppm
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0.1 ppm
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As
|
0.5
|
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Oxygen
|
< 0.2 ppm
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< 0.1 ppm
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B
|
0.3
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Total Hydrocarbon
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< 0.2 ppm
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< 0.1 ppm
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Ca
|
10
|
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Carbon Dioxide
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< 0.2 ppm
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< 0.1 ppm
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Cd
|
2
|
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Carbon Monoxide
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< 0.2 ppm
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< 0.1 ppm
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Co
|
2
|
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Moisture
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< 0.2 ppm
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< 0.1 ppm
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Cr
|
5
|
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Argon
|
< 0.2 ppm
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< 0.1 ppm
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Cu
|
1
|
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Chlorosilanes
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< 0.2 ppm
|
< 0.1 ppm
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Fe
|
2
|
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Helium
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< 10 ppm
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< 10 ppm
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K
|
1
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Hydrogen
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< 30 ppm
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< 20 ppm
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Mg
|
10
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Disilane
|
< 0.2 ppm
|
< 0.1 ppm
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Mn
|
10
|
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Siloxanes
|
< 0.2 ppm
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< 0.1 ppm
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Na
|
1
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Resistivity, ohm/cm
|
> 10,000
|
> 10,000
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Ni
|
1
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Particle
|
10 pcs/cu.ft > 0.1 um
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10 pcs/cu.ft > 0.1 um
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P
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0.5
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Valve Material
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316L SS
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316L SS
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U
|
1
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Valve Design
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Tied Diaphragm
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Tied Diaphragm
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Zn
|
10
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CGA/DISS/JIS Connection
|
330/642/JIS
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330/642/JIS
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Sb
|
10
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Additional Information:
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PYROPHORIC GAS! Silane is a colorless,
air-reactive gas, with a choking effect. This
gas usually ignites upon contact with air, releasing
a dense white cloud of amorphous silicon dioxide.
The primary health hazard associated with Silane
is the potential for severe thermal burns from
contact with flames resulting from the spontaneous
ignition of this gas. Depending on the severity
of the burns, such exposures can be fatal. Flame
or high temperature impinging on a localized area
of the cylinder of this product can cause the
cylinder to burst without activating the cylinder¡¯s
relief devices. If Silane is released at high
pressure or high flow velocity, a delayed detonation
may occur. Silane releases which have not spontaneously
ignited must be considered extremely dangerous,
and should not be approached. Emergency responders
must have personal protective equipment and fire
protection appropriate for the situation to which
they are responding. Do not attempt to extinguish
fire without stopping the flow of the gas.
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