|
|
Silicon Tetrafluoride (SiF4) |
|
 A
highly toxic, colorless, nonflammable compressedgas
with a detectable odor. Hydrolyzed by water to form
hydrofluoric acid.
|
Molecular Weight:
|
104.08
|
Safety Data
|
Vapor Pressure Data
|
|
|
Specific Volume:
|
3.69 cf/lb@NTP
|
ACGIH -TWA: 3 ppm ceiling
|
Temp (Deg. F)
|
Pressure (psia)
|
|
Boiling Point:
|
-138.6°F(-94.8°C) @1 atm
|
32
|
|
|
CAS No.:
|
7783-61-1
|
|
70
|
985.30
|
|
Hazards:
|
Inhalation and skin contact
|
|
|
|
DOT Label:
|
White, Inhalation Hazard; Black
& White, Corrosive Gas |
UN Number:
|
UN 1859
|
|
DOT Class:
|
2.3 |
|
Cylinder:
|
Steel Alloy
|
|
Cylinder
Size
|
DOT
Specification
|
Cylinder
Dimension
(in.)
|
Average
Tare Weight
(lbs)
|
Average
Internal Volume
(ft3)(L)
|
Contents
(lbs)
|
|
200
|
3AA2265
|
9x51
|
119
|
1.55 (43.9)
|
50
|
| SiF4
|
>=
|
99.9% |
%V |
| Air |
=<
|
400 |
ppmv |
| CO2 |
=<
|
400 |
ppmv |
| CO |
=<
|
150 |
ppmv |
| SiF4
|
>=
|
99.995% |
%V |
| O2 |
=<
|
5 |
ppmv |
| N2 |
=<
|
20 |
ppmv |
| CO |
=<
|
1 |
ppmv |
| CO2 |
=<
|
20 |
ppmv |
| THC(CH4) |
=<
|
1 |
ppmv |
| H2 |
=<
|
2 |
ppmv |
| H2S |
=<
|
1 |
ppmv |
| SO2 |
=<
|
1 |
ppmv |
| SiF4
|
>=
|
99.999% |
%V |
| O2 |
=<
|
0.5 |
ppmv |
| N2 |
=<
|
4 |
ppmv |
| CO |
=<
|
0.1 |
ppmv |
| CO2 |
=<
|
3 |
ppmv |
| THC(CH4) |
=<
|
1 |
ppmv |
| H2 |
=<
|
1 |
ppmv |
| H2S |
=<
|
0.1 |
ppmv |
| SO2 |
=<
|
0.1 |
ppmv |
|
Additional Information:
|
Silicon Tetrafluoride is a toxic, corrosive,
nonflammable gas packaged at pressures up to 1000
psig. It has a sharp suffocating odor. The gas
is colorless but fumes white in moist air. Hydrolyzes
to very corrosive hydrofluoric acid on contact
with moisture. Can cause severe chemical burns
if inhaled or upon skin contact. When entering
release areas wear self-contained breathing apparatus
(SCBA). Fully protective suits are required in
large releases.
|
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